Automatic Sample Preparation System

This apparatus is employed to extract a micro sample from the vacuum chamber of a FIB system in order to prepare the desired wafer part for analysis with STEM, TEM, and other techniques.input:
output:Characteristicsinput:
output:FIB micro-sampling unit and FIB micro-sampling methodAn illustration of FIB micro-piller samplinginput:
output:A semiconductor device is directly excised to extract a micro-pillar sample that includes an analysis point. input:
output:By altering the incident FIB-direction, micro-samples are cut out or trimmed into a variety of shapes.input:
output:
An illustration of system configurationinput:
output:FIB-STEM SystemA semiconductor device evaluation system that has been recently developed comprises the HD-2700 200 kV STEM and the FB2200 FIBsystem. The system can complete the process of identifying defective points and analyzing the structure at a sub-nano meter scale in a matter of hours.